CUED Publications database

Optimizing hardness of CNx thin films by dc magnetron sputtering and a statistical approach

Akiyama, M and Alexandrou, I and Chhowalla, M and Amaratunga, GAJ (2001) Optimizing hardness of CNx thin films by dc magnetron sputtering and a statistical approach. J MATER SCI, 36. pp. 5397-5401. ISSN 0022-2461

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Item Type: Article
Uncontrolled Keywords: CARBON NITRIDE FILMS ENERGY NITROGEN IMPLANTATION CHEMICAL-VAPOR-DEPOSITION MECHANICAL-PROPERTIES PHASE GRAPHITE DIAMOND DESIGN
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 02 Sep 2016 17:02
Last Modified: 01 Dec 2016 07:30
DOI: