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Optimizing hardness of CNx thin films by dc magnetron sputtering and a statistical approach

Akiyama, M and Alexandrou, I and Chhowalla, M and Amaratunga, GAJ (2001) Optimizing hardness of CNx thin films by dc magnetron sputtering and a statistical approach. J MATER SCI, 36. pp. 5397-5401. ISSN 0022-2461

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Item Type: Article
Uncontrolled Keywords: CARBON NITRIDE FILMS ENERGY NITROGEN IMPLANTATION CHEMICAL-VAPOR-DEPOSITION MECHANICAL-PROPERTIES PHASE GRAPHITE DIAMOND DESIGN
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:50
Last Modified: 30 Jul 2015 06:47
DOI: