CUED Publications database

Carbon films for use as the electron source in a parallel e-beam lithography system

Milne, WI and Teo, KBK and Chhowalla, M and Amaratunga, GAJ and Yuan, J and Robertson, J and Legagneux, P and Pirio, G and Pribat, D and Bouzehouane, K and Bruenger, W and Trautmann, C (2001) Carbon films for use as the electron source in a parallel e-beam lithography system. In: UNSPECIFIED pp. 235-247..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: field emission diamond-like carbon carbon nanotubes TETRAHEDRAL AMORPHOUS-CARBON FIELD-EMISSION PROPERTIES DIAMOND-LIKE CARBON NANOTUBE ARC
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:57
Last Modified: 17 Mar 2014 14:31
DOI:

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