CUED Publications database

Single-mask silicon microtriode

Garner, DM and Amaratunga, GAJ (1999) Single-mask silicon microtriode. J VAC SCI TECHNOL B, 17. pp. 315-319. ISSN 1071-1023

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Item Type: Article
Uncontrolled Keywords: VACUUM
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:28
Last Modified: 01 May 2015 19:27
DOI: