CUED Publications database

Monte Carlo study of the kickout mechanism of boron diffusion in silicon

deSouza, MM and Amaratunga, GAJ (1996) Monte Carlo study of the kickout mechanism of boron diffusion in silicon. J APPL PHYS, 79. pp. 2418-2425. ISSN 0021-8979

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Item Type: Article
Uncontrolled Keywords: POINT-DEFECTS SYSTEM
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 02 Sep 2016 18:06
Last Modified: 24 Sep 2016 22:40
DOI: