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TRIBOLOGICAL PROPERTIES OF DIAMOND-LIKE CARBON-FILMS DEPOSITED ON SILICON USING RF PLASMA-ENHANCED CVD

SILVA, SRP and KAPOOR, A and AMARATUNGA, GAJ (1995) TRIBOLOGICAL PROPERTIES OF DIAMOND-LIKE CARBON-FILMS DEPOSITED ON SILICON USING RF PLASMA-ENHANCED CVD. SURF COAT TECH, 73. pp. 132-136. ISSN 0257-8972

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Item Type: Article
Uncontrolled Keywords: DIAMOND-LIKE CARBON WEAR AMORPHOUS CARBON CHEMICAL VAPOR DEPOSITION AMORPHOUS-CARBON
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 15 Dec 2015 12:48
Last Modified: 30 Apr 2016 05:44
DOI: