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TRIBOLOGICAL PROPERTIES OF DIAMOND-LIKE CARBON-FILMS DEPOSITED ON SILICON USING RF PLASMA-ENHANCED CVD

SILVA, SRP and KAPOOR, A and AMARATUNGA, GAJ (1995) TRIBOLOGICAL PROPERTIES OF DIAMOND-LIKE CARBON-FILMS DEPOSITED ON SILICON USING RF PLASMA-ENHANCED CVD. SURF COAT TECH, 73. pp. 132-136. ISSN 0257-8972

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Item Type: Article
Uncontrolled Keywords: DIAMOND-LIKE CARBON WEAR AMORPHOUS CARBON CHEMICAL VAPOR DEPOSITION AMORPHOUS-CARBON
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 02 Sep 2016 16:42
Last Modified: 28 Sep 2016 22:03
DOI: