CUED Publications database

DIAMOND-LIKE CARBON THIN-FILM DEPOSITION USING A MAGNETICALLY CONFINED RF PECVD SYSTEM

SILVA, SRP and CLAY, KJ and SPEAKMAN, SP and AMARATUNGA, GAJ (1995) DIAMOND-LIKE CARBON THIN-FILM DEPOSITION USING A MAGNETICALLY CONFINED RF PECVD SYSTEM. In: UNSPECIFIED pp. 977-983..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: DOPING DIAMOND-LIKE CARBON ELECTRICAL PROPERTIES AMORPHOUS HYDROGENATED CARBON
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:31
Last Modified: 22 May 2018 07:42
DOI: