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PATTERN TRANSFER ONTO CARBON-FILMS ON SILICON USING RADIO-FREQUENCY OXYGEN PLASMA-ETCHING

CHAN, KK and AMARATUNGA, GAJ and WONG, TKS (1992) PATTERN TRANSFER ONTO CARBON-FILMS ON SILICON USING RADIO-FREQUENCY OXYGEN PLASMA-ETCHING. J VAC SCI TECHNOL A, 10. pp. 225-228. ISSN 0734-2101

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Item Type: Article
Uncontrolled Keywords: CHEMICAL VAPOR-DEPOSITION DIAMOND THIN-FILMS NUCLEATION PARTICLES GROWTH
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:33
Last Modified: 10 Mar 2014 16:11
DOI: