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PATTERN TRANSFER ONTO CARBON-FILMS ON SILICON USING RADIO-FREQUENCY OXYGEN PLASMA-ETCHING

CHAN, KK and AMARATUNGA, GAJ and WONG, TKS (1992) PATTERN TRANSFER ONTO CARBON-FILMS ON SILICON USING RADIO-FREQUENCY OXYGEN PLASMA-ETCHING. J VAC SCI TECHNOL A, 10. pp. 225-228. ISSN 0734-2101

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Item Type: Article
Uncontrolled Keywords: CHEMICAL VAPOR-DEPOSITION DIAMOND THIN-FILMS NUCLEATION PARTICLES GROWTH
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 15 Dec 2015 13:19
Last Modified: 12 Feb 2016 03:07
DOI: