CUED Publications database

PATTERN TRANSFER ONTO CARBON-FILMS ON SILICON USING RADIO-FREQUENCY OXYGEN PLASMA-ETCHING

CHAN, KK and AMARATUNGA, GAJ and WONG, TKS (1992) PATTERN TRANSFER ONTO CARBON-FILMS ON SILICON USING RADIO-FREQUENCY OXYGEN PLASMA-ETCHING. J VAC SCI TECHNOL A, 10. pp. 225-228. ISSN 0734-2101

Full text not available from this repository.
Item Type: Article
Uncontrolled Keywords: CHEMICAL VAPOR-DEPOSITION DIAMOND THIN-FILMS NUCLEATION PARTICLES GROWTH
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:55
Last Modified: 03 Sep 2015 08:33
DOI: