High sensitive NO2 gas sensor with low power consumption using selectively grown ZnO nanorods.

Park, SJ and Park, J and Lee, HY and Moon, SE and Park, KH and Kim, J and Maeng, S and Udrea, F and Milne, WI and Kim, GT (2010) High sensitive NO2 gas sensor with low power consumption using selectively grown ZnO nanorods. J Nanosci Nanotechnol, 10. pp. 3385-3388. ISSN 1533-4880

Abstract

The noble gas sensor using multiple ZnO nanorods was fabricated with CMOS compatible process and sol-gel growth method on selective area and gas response characteristics to NO2 gas of the sensor device were investigated. We confirmed the sensors had high sensitive response denoted by the sensitivity of several tens for NO2 gas sensing and also showed pretty low power consumption close to 20 mW even though the recovery of resistance come up to almost the initial value.

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