Santra, S and Ali, SZ and Guha, PK and Zhong, G and Robertson, J and Covington, JA and Milne, WI and Gardner, JW and Udrea, F (2010) Post-CMOS wafer level growth of carbon nanotubes for low-cost microsensors--a proof of concept. Nanotechnology, 21. 485301-.Full text not available from this repository.
Here we demonstrate a novel technique to grow carbon nanotubes (CNTs) on addressable localized areas, at wafer level, on a fully processed CMOS substrate. The CNTs were grown using tungsten micro-heaters (local growth technique) at elevated temperature on wafer scale by connecting adjacent micro-heaters through metal tracks in the scribe lane. The electrical and optical characterization show that the CNTs are identical and reproducible. We believe this wafer level integration of CNTs with CMOS circuitry enables the low-cost mass production of CNT sensors, such as chemical sensors.
|Divisions:||Div B > Electronics, Power & Energy Conversion|
|Depositing User:||Cron Job|
|Date Deposited:||28 Oct 2011 16:36|
|Last Modified:||03 Jun 2013 01:10|
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