Yan, J and Seshia, AA (2009) Thermoelastic dissipation in MEMS/NEMS flexural mode resonators. J Nanosci Nanotechnol, 9. pp. 1011-1014. ISSN 1533-4880
Full text not available from this repository.Abstract
Understanding the energy dissipation mechanisms in single-crystal silicon MEMS/NEMS resonators are particularly important to maximizing an important figure of merit relevant for miniature sensor and signal processing applications: the Quality factor (Q) of resonance. This paper discusses thermoelastic dissipation (TED) as the dominant internal-friction mechanism in flexural mode MEMS/NEMS resonators. Criteria for optimizing the geometrical design of flexural mode MEMS/NEMS resonators are theoretically established with a view towards minimizing the TED for single-crystal silicon MEMS/NEMS flexural mode resonators.
| Item Type: | Article |
|---|---|
| Subjects: | UNSPECIFIED |
| Divisions: | Div C > Materials Engineering Div D > Geotechnical and Environmental |
| Depositing User: | Cron Job |
| Date Deposited: | 28 Oct 2011 17:07 |
| Last Modified: | 20 May 2013 01:36 |
| DOI: |
Actions (login required)
| View Item |
