CUED Publications database

Thermoelastic dissipation in MEMS/NEMS flexural mode resonators.

Yan, J and Seshia, AA (2009) Thermoelastic dissipation in MEMS/NEMS flexural mode resonators. J Nanosci Nanotechnol, 9. pp. 1011-1014. ISSN 1533-4880

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Abstract

Understanding the energy dissipation mechanisms in single-crystal silicon MEMS/NEMS resonators are particularly important to maximizing an important figure of merit relevant for miniature sensor and signal processing applications: the Quality factor (Q) of resonance. This paper discusses thermoelastic dissipation (TED) as the dominant internal-friction mechanism in flexural mode MEMS/NEMS resonators. Criteria for optimizing the geometrical design of flexural mode MEMS/NEMS resonators are theoretically established with a view towards minimizing the TED for single-crystal silicon MEMS/NEMS flexural mode resonators.

Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Div D > Geotechnical and Environmental
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:33
Last Modified: 10 Mar 2014 18:06
DOI: