CUED Publications database

Thermoelastic dissipation in MEMS/NEMS flexural mode resonators.

Yan, J and Seshia, AA (2009) Thermoelastic dissipation in MEMS/NEMS flexural mode resonators. J Nanosci Nanotechnol, 9. pp. 1011-1014. ISSN 1533-4880

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Understanding the energy dissipation mechanisms in single-crystal silicon MEMS/NEMS resonators are particularly important to maximizing an important figure of merit relevant for miniature sensor and signal processing applications: the Quality factor (Q) of resonance. This paper discusses thermoelastic dissipation (TED) as the dominant internal-friction mechanism in flexural mode MEMS/NEMS resonators. Criteria for optimizing the geometrical design of flexural mode MEMS/NEMS resonators are theoretically established with a view towards minimizing the TED for single-crystal silicon MEMS/NEMS flexural mode resonators.

Item Type: Article
Divisions: Div C > Applied Mechanics
Div D > Geotechnical and Environmental
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:38
Last Modified: 18 Aug 2020 11:22
DOI: 10.1166/jnn.2009.c075