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The effect of microwave power on the deposition of boron-doped a-SiC:H films using the electron cyclotron resonance method

Yoon, SF and Ji, R and Ahn, J and Milne, WI (1996) The effect of microwave power on the deposition of boron-doped a-SiC:H films using the electron cyclotron resonance method. THIN SOLID FILMS, 288. pp. 155-159. ISSN 0040-6090

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Item Type: Article
Uncontrolled Keywords: amorphous materials carbides conductivity silicon carbide AMORPHOUS-SILICON CARBIDE METHANE
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 15 Dec 2015 12:45
Last Modified: 08 Feb 2016 03:52
DOI: