Yoon, SF and Ji, R and Ahn, J and Milne, WI (1996) The effect of microwave power on the deposition of boron-doped a-SiC:H films using the electron cyclotron resonance method. THIN SOLID FILMS, 288. pp. 155-159. ISSN 0040-6090
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|Item Type: ||Article|
|Uncontrolled Keywords: ||amorphous materials carbides conductivity silicon carbide AMORPHOUS-SILICON CARBIDE METHANE|
|Depositing User: ||Cron Job|
|Date Deposited: ||20 Dec 2011 12:10|
|Last Modified: ||20 May 2013 01:35|
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