CUED Publications database

Vibratory response of diamond-like amorphous carbon cantilevers under different temperatures

Chua, DHC and Tay, BK and Zhang, P and Teo, EHT and Lim, LTW and O'Shea, S and Miao, J and Milne, WI (2004) Vibratory response of diamond-like amorphous carbon cantilevers under different temperatures. In: UNSPECIFIED pp. 1980-1983..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: DLC microcantilevers annealing intrinsic stress diamond-like amorphous carbon microcantilevers resonance frequency ION-IMPLANTATION FILMS ARC IMMERSION
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:32
Last Modified: 27 Nov 2014 19:20
DOI: 10.1016/j.diamond.2004.08.002