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THE DIFFERENT ROLES OF NITROGEN IN RF-SPUTTERED AND RF-GLOW DISCHARGE HYDROGENATED AMORPHOUS-SILICON

SMITH, GJ and MILNE, WI (1983) THE DIFFERENT ROLES OF NITROGEN IN RF-SPUTTERED AND RF-GLOW DISCHARGE HYDROGENATED AMORPHOUS-SILICON. PHILOS MAG B, 47. pp. 419-429. ISSN 0141-8637

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 02 Sep 2016 16:45
Last Modified: 01 Dec 2016 07:41
DOI: