CUED Publications database

Flash-lamp annealing of semiconductor materials - Applications and process models

McMahon, RA and Smith, MP and Seffen, KA and Voelskow, M and Anwand, W and Skorupa, W (2007) Flash-lamp annealing of semiconductor materials - Applications and process models. In: UNSPECIFIED pp. 1301-1305..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: flash-lamp annealing modelling ion-implantation amorphous silicon SILICON CRYSTALLIZATION FILMS RANGE
Subjects: UNSPECIFIED
Divisions: Div D > Structures
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:17
Last Modified: 11 May 2015 10:59
DOI: 10.1016/j.vacuum.2007.01.033