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Process control and melt depth homogenization for SiC-on-Si structures during flash lamp annealing by carbon implantation

Smith, MP and McMahon, RA and Voelskow, M and Skorupa, W and Stoemenos, J and Ferro, G (2006) Process control and melt depth homogenization for SiC-on-Si structures during flash lamp annealing by carbon implantation. J APPL PHYS, 100. -. ISSN 0021-8979

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Item Type: Article
Uncontrolled Keywords: REGROWTH MECHANISMS SILICON
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:32
Last Modified: 30 Sep 2014 11:55
DOI: 10.1063/1.2359684

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