Smith, MP and McMahon, RA and Voelskow, M and Skorupa, W and Stoemenos, J and Ferro, G (2006) Process control and melt depth homogenization for SiC-on-Si structures during flash lamp annealing by carbon implantation. J APPL PHYS, 100. -. ISSN 0021-8979
Full text not available from this repository.| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | REGROWTH MECHANISMS SILICON |
| Subjects: | UNSPECIFIED |
| Divisions: | Div B > Electronics, Power & Energy Conversion |
| Depositing User: | Cron Job |
| Date Deposited: | 11 Nov 2011 10:24 |
| Last Modified: | 20 May 2013 01:40 |
| DOI: | 10.1063/1.2359684 |
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