CUED Publications database

Process control and melt depth homogenization for SiC-on-Si structures during flash lamp annealing by carbon implantation

Smith, MP and McMahon, RA and Voelskow, M and Skorupa, W and Stoemenos, J and Ferro, G (2006) Process control and melt depth homogenization for SiC-on-Si structures during flash lamp annealing by carbon implantation. J APPL PHYS, 100. -. ISSN 0021-8979

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Item Type: Article
Uncontrolled Keywords: REGROWTH MECHANISMS SILICON
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 15 Dec 2015 13:08
Last Modified: 05 May 2016 01:09
DOI: 10.1063/1.2359684