CUED Publications database

Microfluidic pumps employing surface acoustic waves generated in ZnO thin films

Du, XY and Fu, YQ and Luo, JK and Flewitt, AJ and Milne, WI (2009) Microfluidic pumps employing surface acoustic waves generated in ZnO thin films. J APPL PHYS, 105. -. ISSN 0021-8979

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Item Type: Article
Uncontrolled Keywords: bioMEMS contact angle II-VI semiconductors lab-on-a-chip microfluidics micropumps monolayers nanostructured materials piezoelectric thin films piezoelectric transducers self-assembly semiconductor growth semiconductor thin films silicon sputter deposition surface acoustic wave transducers thin film devices wide band gap semiconductors zinc compounds ELECTROWETTING-BASED ACTUATION STRUCTURAL-PROPERTIES SAW LIQUID DROPLETS SENSORS MICROPUMPS SUBSTRATE DEVICES DESIGN
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:25
Last Modified: 06 Oct 2014 01:20
DOI: 10.1063/1.3068326

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