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CHARACTERIZATION OF RAPID ELECTRON-BEAM ANNEALED THIN TITANIUM SILICIDE FILMS

RAMAN, VK and MAHMOOD, F and MCMAHON, RA and AHMED, H and JEYNES, C and HUTT, KW and COOPER, N and GODFREY, DJ (1988) CHARACTERIZATION OF RAPID ELECTRON-BEAM ANNEALED THIN TITANIUM SILICIDE FILMS. J ELECTROCHEM SOC, 135. C125-C125. ISSN 0013-4651

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:58
Last Modified: 10 Mar 2014 18:02
DOI: