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CHARACTERIZATION OF RAPID ELECTRON-BEAM ANNEALED THIN TITANIUM SILICIDE FILMS

RAMAN, VK and MAHMOOD, F and MCMAHON, RA and AHMED, H and JEYNES, C and HUTT, KW and COOPER, N and GODFREY, DJ (1988) CHARACTERIZATION OF RAPID ELECTRON-BEAM ANNEALED THIN TITANIUM SILICIDE FILMS. J ELECTROCHEM SOC, 135. C125-C125. ISSN 0013-4651

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Item Type: Article
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Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:29
Last Modified: 01 May 2015 19:28
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