CUED Publications database

A depletion layer actuator

Ransley, JHT and Durkan, C and Seshia, AA (2007) A depletion layer actuator. In: UNSPECIFIED U705-U706..

Full text not available from this repository.
Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: CMOS compatible micromechanical resonators actuators cantilevers MEMS oscillators
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:51
Last Modified: 17 Mar 2014 14:51
DOI:

Actions (login required)

View Item