CUED Publications database

A depletion layer actuator

Ransley, JHT and Durkan, C and Seshia, AA (2007) A depletion layer actuator. In: UNSPECIFIED U705-U706..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: CMOS compatible micromechanical resonators actuators cantilevers MEMS oscillators
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 09 Dec 2016 17:33
Last Modified: 29 Jun 2017 07:48