CUED Publications database

A depletion layer actuator

Ransley, JHT and Durkan, C and Seshia, AA (2007) A depletion layer actuator. In: UNSPECIFIED U705-U706..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: CMOS compatible micromechanical resonators actuators cantilevers MEMS oscillators
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 16 Jul 2015 13:49
Last Modified: 01 Sep 2015 21:58
DOI: