CUED Publications database

A depletion layer actuator

Ransley, JHT and Durkan, C and Seshia, AA (2007) A depletion layer actuator. In: UNSPECIFIED U705-U706..

Full text not available from this repository.
Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: CMOS compatible micromechanical resonators actuators cantilevers MEMS oscillators
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 09 Dec 2016 17:33
Last Modified: 27 Apr 2017 06:18
DOI: