Ransley, JHT and Durkan, C and Seshia, AA (2007) A depletion layer actuator. In: UNSPECIFIED U705-U706..
Full text not available from this repository.| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
|---|---|
| Uncontrolled Keywords: | CMOS compatible micromechanical resonators actuators cantilevers MEMS oscillators |
| Subjects: | UNSPECIFIED |
| Divisions: | Div C > Materials Engineering |
| Depositing User: | Cron Job |
| Date Deposited: | 28 Oct 2011 17:07 |
| Last Modified: | 20 May 2013 01:36 |
| DOI: |
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