CUED Publications database

Smooth and anisotropic ion beam etching of InP with Ar/H-2 chemistry

Cakmak, B and Yu, SY and Penty, RV and White, IH (2000) Smooth and anisotropic ion beam etching of InP with Ar/H-2 chemistry. In: UNSPECIFIED pp. 139-146..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: ion beam etching chemically assisted ion beam etching InP H2/CH4 chemistry MIXTURES
Subjects: UNSPECIFIED
Divisions: Div B > Photonics
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:48
Last Modified: 10 Mar 2014 17:09
DOI:

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