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RAPID ELECTRON-BEAM INDUCED TANTALUM SILICON REACTIONS

RAMAN, VK and MAHMOOD, F and MCMAHON, RA and AHMED, H and JEYNES, C and SARKAR, D (1989) RAPID ELECTRON-BEAM INDUCED TANTALUM SILICON REACTIONS. APPL SURF SCI, 36. pp. 654-663. ISSN 0169-4332

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 15 Dec 2015 12:47
Last Modified: 05 May 2016 22:37
DOI: