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RAPID ELECTRON-BEAM ISOTHERMAL PROCESSING OF ARSENIC-IMPLANTED NMOS DEVICES

MCMAHON, RA and AHMED, H and GODFREY, D and YALLUP, KJ (1983) RAPID ELECTRON-BEAM ISOTHERMAL PROCESSING OF ARSENIC-IMPLANTED NMOS DEVICES. IEEE T ELECTRON DEV, 30. pp. 1550-1555. ISSN 0018-9383

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:32
Last Modified: 10 Mar 2014 18:02
DOI: