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RAPID ELECTRON-BEAM ISOTHERMAL PROCESSING OF ARSENIC-IMPLANTED NMOS DEVICES

MCMAHON, RA and AHMED, H and GODFREY, D and YALLUP, KJ (1983) RAPID ELECTRON-BEAM ISOTHERMAL PROCESSING OF ARSENIC-IMPLANTED NMOS DEVICES. IEEE T ELECTRON DEV, 30. pp. 1550-1555. ISSN 0018-9383

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Item Type: Article
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Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:49
Last Modified: 02 Sep 2015 02:38
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