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RAPID ELECTRON-BEAM ISOTHERMAL PROCESSING OF ARSENIC-IMPLANTED NMOS DEVICES

MCMAHON, RA and AHMED, H and GODFREY, D and YALLUP, KJ (1983) RAPID ELECTRON-BEAM ISOTHERMAL PROCESSING OF ARSENIC-IMPLANTED NMOS DEVICES. IEEE T ELECTRON DEV, 30. pp. 1550-1555. ISSN 0018-9383

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 09 Dec 2016 17:50
Last Modified: 10 Dec 2016 00:54
DOI: