Iwaki, T and Covington, JA and Gardner, JW and Udrea, F and Blackman, CS and Parkin, IP (2006) SOI-CMOS based single crystal silicon micro-heaters for gas sensors. In: UNSPECIFIED pp. 460-463..
Full text not available from this repository.
| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
| Uncontrolled Keywords: | ELECTRICAL-PROPERTIES HOTPLATE DESIGN |
| Subjects: | UNSPECIFIED |
| Divisions: | Div B > Electronics, Power & Energy Conversion |
| Depositing User: | Cron Job |
| Date Deposited: | 28 Oct 2011 16:36 |
| Last Modified: | 11 Mar 2013 01:46 |
| DOI: | |
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