CUED Publications database

SOI-CMOS based single crystal silicon micro-heaters for gas sensors

Iwaki, T and Covington, JA and Gardner, JW and Udrea, F and Blackman, CS and Parkin, IP (2006) SOI-CMOS based single crystal silicon micro-heaters for gas sensors. In: UNSPECIFIED pp. 460-463..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: ELECTRICAL-PROPERTIES HOTPLATE DESIGN
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 16 Jul 2015 14:04
Last Modified: 26 Jul 2015 00:03
DOI: