HOPPER, GF and MCMAHON, RA and BARFOOT, KM (1991) IMPROVEMENT IN THE THICKNESS UNIFORMITY OF SILICON-ON-INSULATOR LAYERS FORMED BY DUAL ELECTRON-BEAM RECRYSTALLIZATION. J APPL PHYS, 69. pp. 2183-2189. ISSN 0021-8979
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| Item Type: | Article |
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| Uncontrolled Keywords: | PHOSPHOSILICATE GLASS SI FILMS POLYSILICON DEPOSITION STRESS REFLOW |
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| Subjects: | UNSPECIFIED |
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| Divisions: | Div B > Electronics, Power & Energy Conversion |
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| Depositing User: | Cron Job |
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| Date Deposited: | 11 Nov 2011 10:24 |
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| Last Modified: | 11 Mar 2013 01:57 |
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| DOI: | |
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