CUED Publications database

Defects and their passivation in high K gate oxides

Tse, K and Robertson, J (2007) Defects and their passivation in high K gate oxides. MICROELECTRON ENG, 84. pp. 663-668. ISSN 0167-9317

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Item Type: Article
Uncontrolled Keywords: oxides defects passivation calculation DIELECTRIC-CONSTANT OXIDES OXYGEN VACANCY SILICON HYDROGEN NITROGEN STATES HFO2 1ST-PRINCIPLES DEVICES
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:45
Last Modified: 05 Feb 2015 01:00
DOI: 10.1016/j.mee.2006.12.009