CUED Publications database

Defects and their passivation in high K gate oxides

Tse, K and Robertson, J (2007) Defects and their passivation in high K gate oxides. MICROELECTRON ENG, 84. pp. 663-668. ISSN 0167-9317

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Item Type: Article
Uncontrolled Keywords: oxides defects passivation calculation DIELECTRIC-CONSTANT OXIDES OXYGEN VACANCY SILICON HYDROGEN NITROGEN STATES HFO2 1ST-PRINCIPLES DEVICES
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 02 Sep 2016 16:23
Last Modified: 07 Dec 2016 23:22
DOI: