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Novel design and characterisation of SOICMOS micro-hotplates for high temperature gas sensors

Guha, PK and Ali, SZ and Lee, CCC and Udrea, F and Milne, WI and Iwaki, T and Covington, JA and Gardner, JW (2007) Novel design and characterisation of SOICMOS micro-hotplates for high temperature gas sensors. In: UNSPECIFIED pp. 260-266..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: SOI micro-hotplate gas sensor smart sensor
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:44
Last Modified: 20 Oct 2014 01:08
DOI: 10.1016/j.snb.2007.07.047

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