CUED Publications database

Thermo-electro-mechanical simulations of gas sensors based on SOI membranes

Lu, CC and Setiadi, D and Udrea, F and Milne, WI and Covington, JA and Gardner, JW (2000) Thermo-electro-mechanical simulations of gas sensors based on SOI membranes. In: UNSPECIFIED pp. 297-300..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: solid-state gas sensors electro-thermal-mechanical simulations SOI devices multilayer membrane and device optimization
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 15 Dec 2015 13:13
Last Modified: 12 Feb 2016 02:37
DOI: