Lu, CC and Setiadi, D and Udrea, F and Milne, WI and Covington, JA and Gardner, JW (2000) Thermo-electro-mechanical simulations of gas sensors based on SOI membranes. In: UNSPECIFIED pp. 297-300..
Full text not available from this repository.
| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
| Uncontrolled Keywords: | solid-state gas sensors electro-thermal-mechanical simulations SOI devices multilayer membrane and device optimization |
| Subjects: | UNSPECIFIED |
| Divisions: | Div B > Electronics, Power & Energy Conversion |
| Depositing User: | Cron Job |
| Date Deposited: | 28 Oct 2011 16:36 |
| Last Modified: | 20 May 2013 01:37 |
| DOI: | |
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