CUED Publications database

Thermo-electro-mechanical simulations of gas sensors based on SOI membranes

Lu, CC and Setiadi, D and Udrea, F and Milne, WI and Covington, JA and Gardner, JW (2000) Thermo-electro-mechanical simulations of gas sensors based on SOI membranes. In: UNSPECIFIED pp. 297-300..

Full text not available from this repository.
Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: solid-state gas sensors electro-thermal-mechanical simulations SOI devices multilayer membrane and device optimization
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:23
Last Modified: 05 Feb 2015 00:33
DOI: