CUED Publications database

Thermo-electro-mechanical simulations of gas sensors based on SOI membranes

Lu, CC and Setiadi, D and Udrea, F and Milne, WI and Covington, JA and Gardner, JW (2000) Thermo-electro-mechanical simulations of gas sensors based on SOI membranes. In: UNSPECIFIED pp. 297-300..

Full text not available from this repository.
Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: solid-state gas sensors electro-thermal-mechanical simulations SOI devices multilayer membrane and device optimization
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Div B > Electronics, Power & Energy Conversion
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 18 May 2016 18:43
Last Modified: 25 Jul 2016 03:27
DOI: