CUED Publications database

2.2 MHz piezoresistive MEMS oscillator operating in air

Lin, ATH and Yan, JZ and Seshia, AA (2010) 2.2 MHz piezoresistive MEMS oscillator operating in air. In: UNSPECIFIED pp. 1498-1501..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: MEMS oscillator bulk mode piezoresistive sensing
Subjects: UNSPECIFIED
Divisions: Div C > Applied Mechanics
Div D > Geotechnical and Environmental
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:32
Last Modified: 10 Mar 2014 18:06
DOI: 10.1016/j.proeng.2010.09.401