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APPLICATION OF ELECTRON-BEAMS IN THERMAL-PROCESSING OF SEMICONDUCTOR-MATERIALS AND DEVICES

MCMAHON, RA and AHMED, H and GODFREY, DJ and PITT, MG (1983) APPLICATION OF ELECTRON-BEAMS IN THERMAL-PROCESSING OF SEMICONDUCTOR-MATERIALS AND DEVICES. GEC-J RES, 1. pp. 146-156. ISSN 0264-9187

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 09 Dec 2016 17:50
Last Modified: 27 May 2017 00:11
DOI: