CUED Publications database

Nanocrystalline Silicon Thin Films Fabricated at 80 degrees C by Using Electron Cyclotron Resonance Chemical Vapor Deposition

Bu, IYY and Flewitt, AJ and Miline, WI (2010) Nanocrystalline Silicon Thin Films Fabricated at 80 degrees C by Using Electron Cyclotron Resonance Chemical Vapor Deposition. PLASMA SCI TECHNOL, 12. pp. 608-613. ISSN 1009-0630

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Item Type: Article
Uncontrolled Keywords: low temperature nanocrystalline silicon ECR SI-H AMORPHOUS-SILICON PLASMA TRANSISTORS REACTOR GROWTH PERFORMANCE STABILITY PRESSURE DISPLAYS
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:55
Last Modified: 05 Sep 2015 04:49
DOI: 10.1088/1009-0630/12/5/19