CUED Publications database

Study on a novel optical fibre pressure sensor based on MEMS technology

Wang, GL and Fu, YT and Welland, ME and Hodson, HR (2005) Study on a novel optical fibre pressure sensor based on MEMS technology. In: UNSPECIFIED pp. 2145-2148..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: optical fibre pressure sensor MEMS technology deep RIE fabrication
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:52
Last Modified: 05 Feb 2015 01:08
DOI: