CUED Publications database

Study on a novel optical fibre pressure sensor based on MEMS technology

Wang, GL and Fu, YT and Welland, ME and Hodson, HR (2005) Study on a novel optical fibre pressure sensor based on MEMS technology. In: UNSPECIFIED pp. 2145-2148..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: optical fibre pressure sensor MEMS technology deep RIE fabrication
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:47
Last Modified: 17 Mar 2014 14:50
DOI:

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