CUED Publications database

Study on a novel optical fibre pressure sensor based on MEMS technology

Wang, GL and Fu, YT and Welland, ME and Hodson, HR (2005) Study on a novel optical fibre pressure sensor based on MEMS technology. In: UNSPECIFIED pp. 2145-2148..

Full text not available from this repository.
Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: optical fibre pressure sensor MEMS technology deep RIE fabrication
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 15 Dec 2015 13:47
Last Modified: 29 Apr 2016 00:38
DOI: