Ali, SZ and Udrea, F and Milne, WI and Gardner, JW (2008) Tungsten-Based SOI Microhotplates for Smart Gas Sensors. J MICROELECTROMECH S, 17. pp. 1408-1417. ISSN 1057-7157
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| Item Type: | Article |
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| Uncontrolled Keywords: | Gas sensors microhotplates silicon on insulator (SOI) tungsten MICRO-HOTPLATE OPTIMIZATION ARRAY TECHNOLOGY SOICMOS DESIGN PERFORMANCE FABRICATION SUBSTRATE HEATER |
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| Subjects: | UNSPECIFIED |
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| Divisions: | Div B > Electronics, Power & Energy Conversion |
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| Depositing User: | Cron Job |
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| Date Deposited: | 28 Oct 2011 16:36 |
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| Last Modified: | 20 May 2013 01:32 |
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| DOI: | 10.1109/JMEMS.2008.2007228 |
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