CUED Publications database

Tungsten-Based SOI Microhotplates for Smart Gas Sensors

Ali, SZ and Udrea, F and Milne, WI and Gardner, JW (2008) Tungsten-Based SOI Microhotplates for Smart Gas Sensors. J MICROELECTROMECH S, 17. pp. 1408-1417. ISSN 1057-7157

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Item Type: Article
Uncontrolled Keywords: Gas sensors microhotplates silicon on insulator (SOI) tungsten MICRO-HOTPLATE OPTIMIZATION ARRAY TECHNOLOGY SOICMOS DESIGN PERFORMANCE FABRICATION SUBSTRATE HEATER
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:14
Last Modified: 03 Sep 2015 08:10
DOI: 10.1109/JMEMS.2008.2007228