CUED Publications database

A test structure for young modulus extraction through capacitance-voltage measurements

Yan, JZ and Seshia, AA and Steeneken, P and Van Beek, J (2005) A test structure for young modulus extraction through capacitance-voltage measurements. In: UNSPECIFIED pp. 901-903..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: CHIP
Subjects: UNSPECIFIED
Divisions: Div D > Geotechnical and Environmental
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 18 May 2016 18:23
Last Modified: 30 May 2016 03:18
DOI: