CUED Publications database

A test structure for young modulus extraction through capacitance-voltage measurements

Yan, JZ and Seshia, AA and Steeneken, P and Van Beek, J (2005) A test structure for young modulus extraction through capacitance-voltage measurements. In: UNSPECIFIED pp. 901-903..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: CHIP
Subjects: UNSPECIFIED
Divisions: Div D > Geotechnical and Environmental
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 16 Jul 2015 13:50
Last Modified: 03 Sep 2015 02:52
DOI: