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PERFORMANCE OF CMOS DEVICES IN SILICON-ON-SAPPHIRE FILMS AFTER SOLID-PHASE EPITAXIAL-GROWTH WITH RAPID ELECTRON-BEAM HEATING

PETERS, TB and PITT, MB and MCMAHON, RA and HASKO, DG and AHMED, H (1985) PERFORMANCE OF CMOS DEVICES IN SILICON-ON-SAPPHIRE FILMS AFTER SOLID-PHASE EPITAXIAL-GROWTH WITH RAPID ELECTRON-BEAM HEATING. IEEE ELECTR DEVICE L, 6. pp. 482-484. ISSN 0741-3106

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Item Type: Article
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Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:46
Last Modified: 30 Aug 2015 01:53
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