CUED Publications database

Impact of incorporated Al on the TiN/HfO2 interface effective work function

Xiong, K and Robertson, J and Pourtois, G and Petry, J and Muller, M (2008) Impact of incorporated Al on the TiN/HfO2 interface effective work function. J APPL PHYS, 104. -. ISSN 0021-8979

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Item Type: Article
Uncontrolled Keywords: FUNCTION MODULATION ION-IMPLANTATION GATE OXIDES METAL TECHNOLOGY ELECTRODES STABILITY ZIRCONIA DEVICES STACKS
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:32
Last Modified: 17 Mar 2014 15:02
DOI: 10.1063/1.2986158