CUED Publications database

Impact of incorporated Al on the TiN/HfO2 interface effective work function

Xiong, K and Robertson, J and Pourtois, G and Petry, J and Muller, M (2008) Impact of incorporated Al on the TiN/HfO2 interface effective work function. J APPL PHYS, 104. -. ISSN 0021-8979

Full text not available from this repository.
Item Type: Article
Uncontrolled Keywords: FUNCTION MODULATION ION-IMPLANTATION GATE OXIDES METAL TECHNOLOGY ELECTRODES STABILITY ZIRCONIA DEVICES STACKS
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:35
Last Modified: 30 Aug 2015 01:47
DOI: 10.1063/1.2986158