CUED Publications database

Selective epitaxial growth in silicon on insulator: Planarity and mass flow

Williams, DA and McMahon, RA and Ahmed, H and Garry, G and Karapiperis, L and Dieumegard, D (1989) Selective epitaxial growth in silicon on insulator: Planarity and mass flow. Journal of Applied Physics, 65. pp. 3718-3721. ISSN 0021-8979

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:48
Last Modified: 18 Jul 2017 10:45
DOI: