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SELECTIVE EPITAXIAL-GROWTH IN SILICON ON INSULATOR - PLANARITY AND MASS-FLOW

WILLIAMS, DA and MCMAHON, RA and AHMED, H and GARRY, G and KARAPIPERIS, L and DIEUMEGARD, D (1989) SELECTIVE EPITAXIAL-GROWTH IN SILICON ON INSULATOR - PLANARITY AND MASS-FLOW. J APPL PHYS, 65. pp. 3718-3721. ISSN 0021-8979

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:32
Last Modified: 10 Mar 2014 18:02
DOI: