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RAPID ELECTRON-BEAM ANNEALING OF TANTALUM FILMS ON SILICON

MAHMOOD, F and CHEEMA, OS and WILLIAMS, DA and MCMAHON, RA and AHMED, H and SULEMAN, M (1990) RAPID ELECTRON-BEAM ANNEALING OF TANTALUM FILMS ON SILICON. J VAC SCI TECHNOL B, 8. pp. 630-634. ISSN 1071-1023

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:32
Last Modified: 10 Mar 2014 18:02
DOI:

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