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RAPID ELECTRON-BEAM ANNEALING OF TANTALUM FILMS ON SILICON

MAHMOOD, F and CHEEMA, OS and WILLIAMS, DA and MCMAHON, RA and AHMED, H and SULEMAN, M (1990) RAPID ELECTRON-BEAM ANNEALING OF TANTALUM FILMS ON SILICON. J VAC SCI TECHNOL B, 8. pp. 630-634. ISSN 1071-1023

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 18 May 2016 19:06
Last Modified: 25 Jul 2016 03:05
DOI: