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RAPID ELECTRON-BEAM ANNEALING OF TANTALUM FILMS ON SILICON

MAHMOOD, F and CHEEMA, OS and WILLIAMS, DA and MCMAHON, RA and AHMED, H and SULEMAN, M (1990) RAPID ELECTRON-BEAM ANNEALING OF TANTALUM FILMS ON SILICON. J VAC SCI TECHNOL B, 8. pp. 630-634. ISSN 1071-1023

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Date Deposited: 16 Jul 2015 13:53
Last Modified: 29 Aug 2015 21:57
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