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RAPID ELECTRON-BEAM ANNEALING OF TANTALUM FILMS ON SILICON

MAHMOOD, F and CHEEMA, OS and WILLIAMS, DA and MCMAHON, RA and AHMED, H and SULEMAN, M (1990) RAPID ELECTRON-BEAM ANNEALING OF TANTALUM FILMS ON SILICON. J VAC SCI TECHNOL B, 8. pp. 630-634. ISSN 1071-1023

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Item Type: Article
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Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:25
Last Modified: 05 Feb 2015 00:36
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