CUED Publications database

Fabrication and simulation of amorphous carbon cantilever structures

Chua, DHC and Milne, WI (2003) Fabrication and simulation of amorphous carbon cantilever structures. In: UNSPECIFIED pp. 127-133..

Full text not available from this repository.
Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: DIAMOND-LIKE CARBON CATHODIC-ARC DEPOSITION THIN-FILMS MICROMACHINED BEAMS LOW-STRESS HARDNESS VACUUM
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:14
Last Modified: 03 Aug 2015 07:21
DOI: