Chua, DHC and Milne, WI (2003) Fabrication and simulation of amorphous carbon cantilever structures. In: UNSPECIFIED pp. 127-133..
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| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
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| Uncontrolled Keywords: | DIAMOND-LIKE CARBON CATHODIC-ARC DEPOSITION THIN-FILMS MICROMACHINED BEAMS LOW-STRESS HARDNESS VACUUM |
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| Subjects: | UNSPECIFIED |
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| Divisions: | UNSPECIFIED |
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| Depositing User: | Cron Job |
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| Date Deposited: | 20 Dec 2011 12:10 |
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| Last Modified: | 11 Mar 2013 02:02 |
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| DOI: | |
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