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Fabrication and simulation of amorphous carbon cantilever structures

Chua, DHC and Milne, WI (2003) Fabrication and simulation of amorphous carbon cantilever structures. In: UNSPECIFIED pp. 127-133..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: DIAMOND-LIKE CARBON CATHODIC-ARC DEPOSITION THIN-FILMS MICROMACHINED BEAMS LOW-STRESS HARDNESS VACUUM
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:55
Last Modified: 30 Sep 2014 19:13
DOI:

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