CUED Publications database

Fabrication and simulation of amorphous carbon cantilever structures

Chua, DHC and Milne, WI (2003) Fabrication and simulation of amorphous carbon cantilever structures. In: UNSPECIFIED pp. 127-133..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: DIAMOND-LIKE CARBON CATHODIC-ARC DEPOSITION THIN-FILMS MICROMACHINED BEAMS LOW-STRESS HARDNESS VACUUM
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:28
Last Modified: 11 May 2015 10:57
DOI: