McShane, GJ and Boutchich, M and Phani, S and Moore, DF and Lu, TJ (2007) Micro-cantilevers for thin films: Young's modulus. In: UNSPECIFIED pp. 71-83..
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| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
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| Uncontrolled Keywords: | MEMS materials thin films cantilevers scanning surface profiler finite element methods elastic modulus MEMS MATERIALS CHIP |
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| Subjects: | UNSPECIFIED |
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| Divisions: | Div C > Materials Engineering |
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| Depositing User: | Cron Job |
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| Date Deposited: | 23 Jan 2012 18:10 |
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| Last Modified: | 20 May 2013 01:40 |
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| DOI: | |
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