CUED Publications database

Micro-cantilevers for thin films: Young's modulus

McShane, GJ and Boutchich, M and Phani, S and Moore, DF and Lu, TJ (2007) Micro-cantilevers for thin films: Young's modulus. In: UNSPECIFIED pp. 71-83..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: MEMS materials thin films cantilevers scanning surface profiler finite element methods elastic modulus MEMS MATERIALS CHIP
Divisions: Div C > Materials Engineering
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:37
Last Modified: 03 Aug 2017 03:10