CUED Publications database

Young's modulus measurement of thin-film materials using micro-cantilevers

McShane, GJ and Boutchich, M and Phani, AS and Moore, DF and Lu, TJ (2006) Young's modulus measurement of thin-film materials using micro-cantilevers. J MICROMECH MICROENG, 16. pp. 1926-1934. ISSN 0960-1317

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Item Type: Article
Uncontrolled Keywords: MEMS MATERIALS CHIP
Subjects: UNSPECIFIED
Divisions: Div C > Materials Engineering
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 15 Dec 2015 13:09
Last Modified: 02 May 2016 06:37
DOI: 10.1088/0960-1317/16/10/003