McShane, GJ and Boutchich, M and Phani, AS and Moore, DF and Lu, TJ (2006) Young's modulus measurement of thin-film materials using micro-cantilevers. J MICROMECH MICROENG, 16. pp. 1926-1934. ISSN 0960-1317
Full text not available from this repository.| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | MEMS MATERIALS CHIP |
| Subjects: | UNSPECIFIED |
| Divisions: | Div C > Materials Engineering |
| Depositing User: | Cron Job |
| Date Deposited: | 23 Jan 2012 18:10 |
| Last Modified: | 20 May 2013 01:41 |
| DOI: | 10.1088/0960-1317/16/10/003 |
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