CUED Publications database

Young's modulus measurement of thin-film materials using micro-cantilevers

McShane, GJ and Boutchich, M and Phani, AS and Moore, DF and Lu, TJ (2006) Young's modulus measurement of thin-film materials using micro-cantilevers. J MICROMECH MICROENG, 16. pp. 1926-1934. ISSN 0960-1317

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Item Type: Article
Uncontrolled Keywords: MEMS MATERIALS CHIP
Subjects: UNSPECIFIED
Divisions: Div C > Materials Engineering
Depositing User: Cron Job
Date Deposited: 17 Jul 2017 19:36
Last Modified: 03 Aug 2017 03:09
DOI: