CUED Publications database

Young's modulus measurement of thin-film materials using micro-cantilevers

McShane, GJ and Boutchich, M and Phani, AS and Moore, DF and Lu, TJ (2006) Young's modulus measurement of thin-film materials using micro-cantilevers. J MICROMECH MICROENG, 16. pp. 1926-1934. ISSN 0960-1317

Full text not available from this repository.
Item Type: Article
Uncontrolled Keywords: MEMS MATERIALS CHIP
Subjects: UNSPECIFIED
Divisions: Div C > Materials Engineering
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:32
Last Modified: 08 Dec 2014 02:39
DOI: 10.1088/0960-1317/16/10/003