CUED Publications database

Influence of Process Route on Membrane Profile and Q-Factor of an Acoustic Resonator Sensor

Staack, NS and Flewitt, AJ (2010) Influence of Process Route on Membrane Profile and Q-Factor of an Acoustic Resonator Sensor. In: UNSPECIFIED pp. 1388-1391..

Full text not available from this repository.
Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: Acoustic Resonator Acoustic Sensing Q-Factor
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 15 Dec 2015 12:43
Last Modified: 02 May 2016 01:21
DOI: 10.1016/j.proeng.2010.09.374