CUED Publications database

Influence of Process Route on Membrane Profile and Q-Factor of an Acoustic Resonator Sensor

Staack, NS and Flewitt, AJ (2010) Influence of Process Route on Membrane Profile and Q-Factor of an Acoustic Resonator Sensor. In: UNSPECIFIED pp. 1388-1391..

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Uncontrolled Keywords: Acoustic Resonator Acoustic Sensing Q-Factor
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Cron Job
Date Deposited: 15 Dec 2015 12:43
Last Modified: 13 Feb 2016 04:31
DOI: 10.1016/j.proeng.2010.09.374