CUED Publications database

Ultra-high temperature (> 300 degrees C) suspended thermodiode in SOI CMOS technology

Santra, S and Udrea, F and Guha, PK and Ali, SZ and Haneef, I (2010) Ultra-high temperature (> 300 degrees C) suspended thermodiode in SOI CMOS technology. MICROELECTRON J, 41. pp. 540-546. ISSN 0026-2692

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Item Type: Article
Uncontrolled Keywords: SOI CMOS Thermodiode RTDs High temperature sensors Smart sensors AIR-BRIDGE HEATER SILICON DIODE SENSOR DIODE GAS SENSORS TRANSISTORS
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 16 Jul 2015 13:25
Last Modified: 28 Aug 2015 23:15
DOI: 10.1016/j.mejo.2009.12.005