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RAPID ISOTHERMAL PROCESSING WITH ELECTRON-BEAMS OF SMALL-GEOMETRY CMOS DEVICES

YALLUP, KJ and GODFREY, DJ and MCMAHON, RA and AHMED, H (1987) RAPID ISOTHERMAL PROCESSING WITH ELECTRON-BEAMS OF SMALL-GEOMETRY CMOS DEVICES. IEEE T ELECTRON DEV, 34. pp. 1688-1693. ISSN 0018-9383

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Item Type: Article
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Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:26
Last Modified: 01 May 2015 19:24
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