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RAPID ISOTHERMAL PROCESSING WITH ELECTRON-BEAMS OF SMALL-GEOMETRY CMOS DEVICES

YALLUP, KJ and GODFREY, DJ and MCMAHON, RA and AHMED, H (1987) RAPID ISOTHERMAL PROCESSING WITH ELECTRON-BEAMS OF SMALL-GEOMETRY CMOS DEVICES. IEEE T ELECTRON DEV, 34. pp. 1688-1693. ISSN 0018-9383

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 18 May 2016 19:06
Last Modified: 29 Aug 2016 04:57
DOI: