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RAPID ISOTHERMAL PROCESSING WITH ELECTRON-BEAMS OF SMALL-GEOMETRY CMOS DEVICES

YALLUP, KJ and GODFREY, DJ and MCMAHON, RA and AHMED, H (1987) RAPID ISOTHERMAL PROCESSING WITH ELECTRON-BEAMS OF SMALL-GEOMETRY CMOS DEVICES. IEEE T ELECTRON DEV, 34. pp. 1688-1693. ISSN 0018-9383

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:31
Last Modified: 10 Mar 2014 18:02
DOI: