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PRODUCTION OF SILICON-OXIDES FROM THE GLOW-DISCHARGE DECOMPOSITION OF SILANE AND NO-2

EAGLE, DJ and MILNE, WI (1987) PRODUCTION OF SILICON-OXIDES FROM THE GLOW-DISCHARGE DECOMPOSITION OF SILANE AND NO-2. THIN SOLID FILMS, 147. pp. 259-266. ISSN 0040-6090

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Item Type: Article
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Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 16 Jul 2015 13:14
Last Modified: 01 Aug 2015 22:08
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