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ELECTRON-BEAM PROCESSING FOR MOS DEVICES WITH SHALLOW JUNCTIONS

MCMAHON, RA and HASKO, DG and AHMED, H (1985) ELECTRON-BEAM PROCESSING FOR MOS DEVICES WITH SHALLOW JUNCTIONS. SOLID STATE TECHNOL, 28. pp. 208-215. ISSN 0038-111X

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 02 Sep 2016 16:46
Last Modified: 01 Dec 2016 09:14
DOI: