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HIGHLY CONTROLLED DIFFUSION OF ION-IMPLANTED ARSENIC BY MULTIPLE SCAN ELECTRON-BEAM HEATING

GODFREY, DJ and MCMAHON, RA and AHMED, H and DOWSETT, M (1983) HIGHLY CONTROLLED DIFFUSION OF ION-IMPLANTED ARSENIC BY MULTIPLE SCAN ELECTRON-BEAM HEATING. J PHYS-PARIS, 44. pp. 229-233. ISSN 0302-0738

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:56
Last Modified: 10 Mar 2014 18:02
DOI: