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HIGHLY CONTROLLED DIFFUSION OF ION-IMPLANTED ARSENIC BY MULTIPLE SCAN ELECTRON-BEAM HEATING

GODFREY, DJ and MCMAHON, RA and AHMED, H and DOWSETT, M (1983) HIGHLY CONTROLLED DIFFUSION OF ION-IMPLANTED ARSENIC BY MULTIPLE SCAN ELECTRON-BEAM HEATING. J PHYS-PARIS, 44. pp. 229-233. ISSN 0302-0738

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Item Type: Article
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Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:26
Last Modified: 01 May 2015 19:25
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