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HIGHLY CONTROLLED DIFFUSION OF ION-IMPLANTED ARSENIC BY MULTIPLE SCAN ELECTRON-BEAM HEATING

GODFREY, DJ and MCMAHON, RA and AHMED, H and DOWSETT, M (1983) HIGHLY CONTROLLED DIFFUSION OF ION-IMPLANTED ARSENIC BY MULTIPLE SCAN ELECTRON-BEAM HEATING. J PHYS-PARIS, 44. pp. 229-233. ISSN 0302-0738

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Date Deposited: 16 Jul 2015 13:53
Last Modified: 04 Sep 2015 21:40
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