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HIGHLY CONTROLLED DIFFUSION OF ION-IMPLANTED ARSENIC BY MULTIPLE SCAN ELECTRON-BEAM HEATING

GODFREY, DJ and MCMAHON, RA and AHMED, H and DOWSETT, M (1983) HIGHLY CONTROLLED DIFFUSION OF ION-IMPLANTED ARSENIC BY MULTIPLE SCAN ELECTRON-BEAM HEATING. J PHYS-PARIS, 44. pp. 229-233. ISSN 0302-0738

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 15 Dec 2015 13:07
Last Modified: 05 May 2016 22:38
DOI: