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TOPOGRAPHICAL ANALYSIS IN THE SEM USING AN AUTOMATIC FOCUSING TECHNIQUE

HOLBURN, DM and SMITH, KCA (1982) TOPOGRAPHICAL ANALYSIS IN THE SEM USING AN AUTOMATIC FOCUSING TECHNIQUE. J MICROSC-OXFORD, 127. pp. 93-103. ISSN 0022-2720

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Solid State Electronics and Nanoscale Science
Depositing User: Unnamed user with email sms67@cam.ac.uk
Date Deposited: 15 Dec 2015 13:19
Last Modified: 11 Feb 2016 01:43
DOI: