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ELECTRON-BEAM ANNEALING OF B-IMPLANTED, P-IMPLANTED, AS-IMPLANTED, SB-IMPLANTED, AND GA-IMPLANTED SILICON BY MULTIPLE-SCAN METHOD

MCMAHON, RA and AHMED, H (1982) ELECTRON-BEAM ANNEALING OF B-IMPLANTED, P-IMPLANTED, AS-IMPLANTED, SB-IMPLANTED, AND GA-IMPLANTED SILICON BY MULTIPLE-SCAN METHOD. IEE PROC-I, 129. pp. 105-110. ISSN 0956-3776

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: UNSPECIFIED
Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:30
Last Modified: 01 May 2015 19:28
DOI: