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ELECTRON-BEAM ANNEALING OF B-IMPLANTED, P-IMPLANTED, AS-IMPLANTED, SB-IMPLANTED, AND GA-IMPLANTED SILICON BY MULTIPLE-SCAN METHOD

MCMAHON, RA and AHMED, H (1982) ELECTRON-BEAM ANNEALING OF B-IMPLANTED, P-IMPLANTED, AS-IMPLANTED, SB-IMPLANTED, AND GA-IMPLANTED SILICON BY MULTIPLE-SCAN METHOD. IEE PROC-I, 129. pp. 105-110. ISSN 0956-3776

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:57
Last Modified: 10 Mar 2014 18:02
DOI:

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