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RECRYSTALLIZATION OF CVD POLY-SI ON INSULATOR BY DUAL ELECTRON-BEAM PROCESSING

DAVIS, JR and MCMAHON, RA and AHMED, H (1982) RECRYSTALLIZATION OF CVD POLY-SI ON INSULATOR BY DUAL ELECTRON-BEAM PROCESSING. ELECTRON LETT, 18. pp. 163-164. ISSN 0013-5194

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Item Type: Article
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Depositing User: Cron job
Date Deposited: 16 Jul 2015 13:51
Last Modified: 03 Aug 2015 06:42
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