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RECRYSTALLIZATION OF CVD POLY-SI ON INSULATOR BY DUAL ELECTRON-BEAM PROCESSING

DAVIS, JR and MCMAHON, RA and AHMED, H (1982) RECRYSTALLIZATION OF CVD POLY-SI ON INSULATOR BY DUAL ELECTRON-BEAM PROCESSING. ELECTRON LETT, 18. pp. 163-164. ISSN 0013-5194

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:31
Last Modified: 10 Mar 2014 18:02
DOI: