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DIRECT DEVICE FABRICATION BY SELECTED AREA E-BEAM ANNEALING

MCMAHON, RA and AHMED, H (1979) DIRECT DEVICE FABRICATION BY SELECTED AREA E-BEAM ANNEALING. J VAC SCI TECHNOL, 16. pp. 1840-1842. ISSN 0022-5355

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Item Type: Article
Subjects: UNSPECIFIED
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Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:19
Last Modified: 05 Feb 2015 00:27
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