CUED Publications database

DEPOSITION OF THIN-FILMS USING THE IONIZED CLUSTER BEAM METHOD

HUQ, SE and MCMAHON, RA and AHMED, H (1990) DEPOSITION OF THIN-FILMS USING THE IONIZED CLUSTER BEAM METHOD. SEMICOND SCI TECH, 5. pp. 771-781. ISSN 0268-1242

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 07 Mar 2014 11:31
Last Modified: 10 Mar 2014 18:02
DOI: