CUED Publications database

DEPOSITION OF THIN-FILMS USING THE IONIZED CLUSTER BEAM METHOD

HUQ, SE and MCMAHON, RA and AHMED, H (1990) DEPOSITION OF THIN-FILMS USING THE IONIZED CLUSTER BEAM METHOD. SEMICOND SCI TECH, 5. pp. 771-781. ISSN 0268-1242

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Item Type: Article
Subjects: UNSPECIFIED
Divisions: Div B > Electronics, Power & Energy Conversion
Depositing User: Cron Job
Date Deposited: 15 Dec 2015 12:47
Last Modified: 06 Feb 2016 02:51
DOI: