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DEPOSITION OF THIN-FILMS USING THE IONIZED CLUSTER BEAM METHOD

HUQ, SE and MCMAHON, RA and AHMED, H (1990) DEPOSITION OF THIN-FILMS USING THE IONIZED CLUSTER BEAM METHOD. SEMICOND SCI TECH, 5. pp. 771-781. ISSN 0268-1242

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Item Type: Article
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Depositing User: Cron job
Date Deposited: 04 Feb 2015 22:29
Last Modified: 05 Feb 2015 00:41
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